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Titanium Silicide Formation in Presence of Oxygen
Titanium Silicide rf Sputtering Resistivity vs. Temperature Rutherford Backscattering Spectrometry Auger Spectroscopy X-Ray Diffraction
2010/12/16
In-situ resistivity vs. temperature, Rutherford backscattering spectrometry, Auger electron spectroscopy and X-ray diffraction measurements have been performed in order to study the effects arising fr...