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The Temperature Dependence of Dark Conductivity in Hydrogenated Amorphous SiNx Films
A. Dark Conductivity B. Activation energy C. Pre-exponential factor D. Hydrogenated amorphous silicon nitride
2010/4/15
Thin film samples of hydrogenated amorphous silicon nitride with varying nitrogen content were prepared by conventional plasma deposition from a mixture of SiH4 and NH3 . The dark conductivity (sd) of...
Vacuum Cryostat's Pressure Dependent Dark Conductivity Measurements on a-Si:H and a-SiN:H Films
A. Dark conductivity B. Cryostat pressure C.Surface effect
2010/4/15
The electrical properties of a-Si:( H ) and a- SiN ):( H ) films prepared by plasma deposition from SiH4+NH3 gas mixtures have been investigated. We observed anomalous peaks in the temperature depende...