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Effects of Electron Back-scattering in Observations of Cross-sectioned GaAs/AlAs Superlattice with Auger Electron Spectroscopy
Effects Electron Back-scattering Observations Cross-sectioned GaAs/AlAs Superlattice Auger Electron Spectroscopy
2010/9/17
Cross-sections of GaAs/AlAs thin films prepared by cleavage of MBE-grown superlattices have been analyzed with Auger electron spectroscopy with a spatial resolution of 6 nm. Elemental distributions o...