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Robust design of Si/Si3N4 high contrast grating mirror for mid-infrared VCSEL application
High contrast grating mirror mid-infrared VCSEL Robust design
2012/5/28
A Si/Si3N4 high contrast grating mirror has been designed for a VCSEL integration in mid-infrared ({\lambda} = 2.65 $\mu$m). The use of an optimization algorithm which maximizes a VCSEL mirror quality...